Thin films and electronic materials
State of the art electrical, optical and structural characterisation techniques are being used to optimise different thin film metallisation processes, ion etching and heat treatment procedures of a wide variety of electronic materials used in microelectronics manufacturing. The change of electronic materials by controlled modification of their electro-optical properties when exposing them to radiation and energetic particles is being researched
Research Output
Chapters in books
Auret FD: 2001. Electrical Characterization of Defects Introduced in Epitaxially Grown GaAs by Electron-, Proton- and He-Ion Irradiation. In Defects in Optoelectronic Materials, (7), Gordon and Breach Science Publishers, pp 255-343. Prins JF: 2001. Large dopants in diamond. In Properties, Growth and Applications of Diamond, (3.2), INSPEC, The Institution of Electrical Engineers, London, London, pp 331-336. |